MEMS and Microsystems
Semester 2, 2018
Staff
Calendar notes
Introduction to working principles and fabrication of MEMS/microsystems such as microsensors, microactuators, microfluidics, etc. Exposure to engineering design principles including engineering mechanics, fluidics, materials, etc. at microscale. Exposure to microfabrication processes as part of a laboratory component. Prerequisite: MECHENG 211, 242Restriction: MECHENG 728
Intended learning outcomes |
Related graduate attributes |
Related assessments |
|---|---|---|
MEMS devices: The student will be exposed to various types of MEMS and microsystems including sensors and actuators. Various design of the MEMS devices will also be discussed. |
ENGA01: engineering knowledge (4) ENGA04: investigation (3) ENGK04: specialist knowledge (4) ENGK05: engineering design (2) ENGK06: engineering practice (2) ENGK08: research literature (2) ENGP01: depth of knowledge required (4) UOA_1: Disciplinary Knowledge and Practice (2) UOA_2: Critical Thinking (4) UOA_3: Solution Seeking (3) UOA_5: Independence and Integrity (1) UOA_6: Social and Environmental Responsiblities (1) |
Test MEMS Design |
Polymer MEMS and fabrication techniques • Discusses alternative materials especially polymer in MEMS and its associated fabrication process. Explore representative sensors using these materials. |
ENGA01: engineering knowledge (4) ENGA03: design and solution development (3) ENGK01: theory of natural sciences (3) ENGK04: specialist knowledge (4) ENGK05: engineering design (2) ENGK06: engineering practice (2) ENGK08: research literature (2) ENGP01: depth of knowledge required (4) ENGP04: familiarity of issues (3) ENGP07: interdependence (3) UOA_1: Disciplinary Knowledge and Practice (2) UOA_3: Solution Seeking (3) UOA_5: Independence and Integrity (1) UOA_6: Social and Environmental Responsiblities (1) |
Photolighography Test MEMS Design |
MEMS microfabrication: The student will be able to explain and draw the fabrication process of a given MEMS structure. The student will be able to select structural and sacrificial materials to be used in photolithography. They will be able to explain and visually represent silicon wafer orientation and related etching performance. The student will be able to discuss the use of polymer as a replacement for silicon in specific applications. |
ENGA01: engineering knowledge (4) ENGA03: design and solution development (3) ENGA04: investigation (3) ENGA09: individual and team work (1) ENGA10: communication (1) ENGA12: lifelong learning (1) ENGK03: abstraction and formulation (1) ENGK05: engineering design (2) ENGK06: engineering practice (2) ENGK08: research literature (2) ENGP01: depth of knowledge required (4) ENGP02: range of conflicting requirements (2) ENGP03: depth of analysis required (1) ENGP07: interdependence (3) UOA_1: Disciplinary Knowledge and Practice (2) UOA_2: Critical Thinking (4) UOA_3: Solution Seeking (3) UOA_4: Communication and Engagement (1) UOA_5: Independence and Integrity (1) UOA_6: Social and Environmental Responsiblities (1) |
Photolighography Test MEMS Design |
Microfluidics: The student will learn the underlying fluid mechanics and physics behind micro-scale flows, principles of sensing and transduction within microfluidic devices and the design process for microfluidic devices. |
ENGA01: engineering knowledge (4) ENGA02: problem analysis (2) ENGA03: design and solution development (3) ENGA04: investigation (3) ENGA05: modern tool usage (1) ENGA09: individual and team work (1) ENGA10: communication (1) ENGK01: theory of natural sciences (3) ENGK02: mathematical modelling (2) ENGK03: abstraction and formulation (1) ENGK04: specialist knowledge (4) ENGK05: engineering design (2) ENGK06: engineering practice (2) ENGK08: research literature (2) ENGP01: depth of knowledge required (4) ENGP02: range of conflicting requirements (2) ENGP03: depth of analysis required (1) ENGP04: familiarity of issues (3) ENGP07: interdependence (3) UOA_1: Disciplinary Knowledge and Practice (2) UOA_2: Critical Thinking (4) UOA_3: Solution Seeking (3) UOA_4: Communication and Engagement (1) UOA_5: Independence and Integrity (1) UOA_6: Social and Environmental Responsiblities (1) |
Microfluidics Test |
Materials & Engineering Mechanics for MEMS and Microsystems • Discussion of the different type of materials used to construct MEMS and microsystems. • A review of static and dynamic mechanics and required in the design of MEMS or microsystems. |
ENGA01: engineering knowledge (4) ENGA02: problem analysis (2) ENGA03: design and solution development (3) ENGA04: investigation (3) ENGA12: lifelong learning (1) ENGK01: theory of natural sciences (3) ENGK02: mathematical modelling (2) ENGP01: depth of knowledge required (4) ENGP02: range of conflicting requirements (2) ENGP03: depth of analysis required (1) ENGP04: familiarity of issues (3) UOA_1: Disciplinary Knowledge and Practice (2) UOA_2: Critical Thinking (4) UOA_3: Solution Seeking (3) UOA_5: Independence and Integrity (1) UOA_6: Social and Environmental Responsiblities (1) |
Test MEMS Design |
Scaling laws in Miniaturisation • Review of the effect of geometry scaling towards the various quantities such as force, power, etc. |
ENGA01: engineering knowledge (4) ENGA02: problem analysis (2) ENGA04: investigation (3) ENGA12: lifelong learning (1) ENGK01: theory of natural sciences (3) ENGK02: mathematical modelling (2) ENGK04: specialist knowledge (4) ENGK06: engineering practice (2) ENGK08: research literature (2) ENGP01: depth of knowledge required (4) ENGP03: depth of analysis required (1) ENGP07: interdependence (3) UOA_1: Disciplinary Knowledge and Practice (2) UOA_2: Critical Thinking (4) UOA_3: Solution Seeking (3) UOA_5: Independence and Integrity (1) UOA_6: Social and Environmental Responsiblities (1) |
Test MEMS Design |
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